VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
CENTER REGION OF POLISHED GaAs WAFER (35 DEG TOA, AS RECEIVED)
1

NORM
REGULAR
4
0
0
0
0
0
4

CENTER REGION OF POLISHED GaAs WAFER (35 DEG TOA, AS RECEIVED)
2003
5
7
23
6
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
55
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
256
0
1767
0.304446
0.306991
232
0.306991
191
0.30697
212
0.30695
200
0.30693
180
0.30691
177
0.306889
216
0.306869
149
0.306849
162
0.306829
151
0.306808
217
0.306788
154
0.306768
223
0.306748
173
0.306727
142
0.306707
139
0.306687
178
0.306667
136
0.306647
140
0.306626
126
0.306606
142
0.306586
158
0.306566
156
0.306546
127
0.306525
153
0.306505
176
0.306485
158
0.306465
132
0.306445
140
0.306425
133
0.306404
140
0.306384
132
0.306364
115
0.306344
101
0.306324
103
0.306304
114
0.306284
116
0.306263
101
0.306243
125
0.306223
130
0.306203
104
0.306183
79
0.306163
86
0.306143
117
0.306123
150
0.306102
142
0.306082
112
0.306062
98
0.306042
120
0.306022
152
0.306002
160
0.305982
178
0.305962
194
0.305942
216
0.305922
290
0.305902
303
0.305881
386
0.305861
404
0.305841
547
0.305821
627
0.305801
670
0.305781
750
0.305761
745
0.305741
743
0.305721
730
0.305701
694
0.305681
600
0.305661
548
0.305641
426
0.305621
370
0.305601
287
0.305581
237
0.305561
235
0.305541
260
0.305521
283
0.305501
326
0.305481
479
0.305461
610
0.305441
776
0.305421
1063
0.305401
1234
0.305381
1458
0.305361
1650
0.305341
1765
0.305321
1767
0.305301
1698
0.305281
1593
0.305261
1252
0.305241
911
0.305221
594
0.305201
342
0.305181
162
0.305161
84
0.305141
82
0.305121
47
0.305102
27
0.305082
26
0.305062
11
0.305042
46
0.305022
37
0.305002
20
0.304982
2
0.304962
0
0.304942
29
0.304922
61
0.304902
49
0.304882
43
0.304863
18
0.304843
44
0.304823
46
0.304803
50
0.304783
65
0.304763
75
0.304743
71
0.304723
56
0.304704
61
0.304684
52
0.304664
73
0.304644
57
0.304624
91
0.304604
75
0.304584
70
0.304565
30
0.304545
46
0.304525
35
0.304505
23
0.304485
33
0.304466
29
0.304446

CENTER REGION OF POLISHED GaAs WAFER (35 DEG TOA, AS RECEIVED)
2003
5
7
23
6
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
30
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
256
60
1561
0.301342
0.303818
175
0.303818
191
0.303799
170
0.303779
162
0.303759
153
0.303739
145
0.30372
152
0.3037
180
0.30368
166
0.303661
148
0.303641
157
0.303621
146
0.303602
173
0.303582
159
0.303562
152
0.303543
158
0.303523
156
0.303503
154
0.303484
165
0.303464
148
0.303444
176
0.303425
162
0.303405
168
0.303385
152
0.303366
143
0.303346
172
0.303327
176
0.303307
175
0.303287
170
0.303268
177
0.303248
174
0.303228
180
0.303209
154
0.303189
183
0.30317
147
0.30315
152
0.303131
196
0.303111
174
0.303091
169
0.303072
142
0.303052
154
0.303033
162
0.303013
178
0.302993
151
0.302974
163
0.302954
158
0.302935
169
0.302915
170
0.302896
170
0.302876
161
0.302857
216
0.302837
206
0.302818
242
0.302798
291
0.302778
293
0.302759
382
0.302739
425
0.30272
463
0.3027
561
0.302681
698
0.302661
791
0.302642
1088
0.302622
1264
0.302603
1388
0.302583
1561
0.302564
1424
0.302544
1257
0.302525
948
0.302505
678
0.302486
417
0.302466
257
0.302447
200
0.302427
137
0.302408
109
0.302389
108
0.302369
109
0.30235
86
0.30233
94
0.302311
72
0.302291
79
0.302272
65
0.302252
86
0.302233
71
0.302214
79
0.302194
60
0.302175
65
0.302155
71
0.302136
98
0.302116
74
0.302097
68
0.302078
64
0.302058
75
0.302039
76
0.302019
65
0.302
87
0.301981
90
0.301961
81
0.301942
87
0.301922
94
0.301903
90
0.301884
108
0.301864
98
0.301845
79
0.301826
100
0.301806
105
0.301787
113
0.301767
107
0.301748
88
0.301729
108
0.301709
106
0.30169
133
0.301671
124
0.301651
99
0.301632
103
0.301613
115
0.301593
93
0.301574
101
0.301555
95
0.301535
70
0.301516
84
0.301497
93
0.301477
94
0.301458
83
0.301439
93
0.30142
79
0.3014
76
0.301381
73
0.301362
72
0.301342

CENTER REGION OF POLISHED GaAs WAFER (35 DEG TOA, AS RECEIVED)
2003
5
7
23
6
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
296
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
256
0
836
0.339483
0.342893
70
0.342893
0
0.342866
131
0.342838
84
0.342811
52
0.342784
122
0.342757
40
0.34273
116
0.342703
170
0.342675
97
0.342648
140
0.342621
65
0.342594
56
0.342567
125
0.34254
97
0.342512
162
0.342485
47
0.342458
136
0.342431
208
0.342404
90
0.342377
152
0.34235
163
0.342323
114
0.342296
107
0.342269
48
0.342241
199
0.342214
155
0.342187
74
0.34216
173
0.342133
196
0.342106
219
0.342079
159
0.342052
104
0.342025
77
0.341998
167
0.341971
73
0.341944
153
0.341917
102
0.34189
127
0.341863
217
0.341836
155
0.341809
163
0.341782
77
0.341755
96
0.341728
236
0.341701
201
0.341674
221
0.341647
134
0.34162
129
0.341593
198
0.341566
249
0.341539
196
0.341512
151
0.341486
168
0.341459
160
0.341432
100
0.341405
201
0.341378
329
0.341351
264
0.341324
293
0.341297
315
0.34127
359
0.341244
328
0.341217
485
0.34119
598
0.341163
680
0.341136
730
0.341109
780
0.341082
772
0.341056
667
0.341029
836
0.341002
649
0.340975
559
0.340948
520
0.340922
479
0.340895
444
0.340868
193
0.340841
244
0.340814
302
0.340788
294
0.340761
249
0.340734
398
0.340707
314
0.340681
230
0.340654
200
0.340627
209
0.3406
274
0.340574
229
0.340547
313
0.34052
285
0.340494
413
0.340467
412
0.34044
360
0.340413
367
0.340387
352
0.34036
315
0.340333
503
0.340307
463
0.34028
412
0.340253
479
0.340227
435
0.3402
378
0.340173
410
0.340147
434
0.34012
521
0.340094
453
0.340067
455
0.34004
482
0.340014
520
0.339987
532
0.33996
494
0.339934
526
0.339907
552
0.339881
525
0.339854
435
0.339828
556
0.339801
491
0.339774
562
0.339748
610
0.339721
471
0.339695
380
0.339668
382
0.339642
386
0.339615
406
0.339589
514
0.339562
405
0.339536
348
0.339509
320
0.339483

CENTER REGION OF POLISHED GaAs WAFER (35 DEG TOA, AS RECEIVED)
2003
5
7
23
6
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_4
data_4
-1
Binding energy
eV
542
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
256
0
3031
0.389054
0.393976
326
0.393976
320
0.393936
199
0.393897
198
0.393857
161
0.393818
334
0.393779
239
0.393739
198
0.3937
227
0.393661
306
0.393621
291
0.393582
229
0.393543
252
0.393503
350
0.393464
314
0.393425
226
0.393386
195
0.393346
380
0.393307
379
0.393268
247
0.393229
299
0.393189
233
0.39315
257
0.393111
305
0.393072
314
0.393033
331
0.392994
218
0.392954
216
0.392915
265
0.392876
326
0.392837
394
0.392798
310
0.392759
191
0.39272
295
0.392681
306
0.392642
405
0.392603
337
0.392564
375
0.392525
292
0.392486
290
0.392447
265
0.392408
312
0.392369
327
0.39233
291
0.392291
223
0.392252
356
0.392213
496
0.392174
329
0.392135
346
0.392096
535
0.392057
490
0.392018
554
0.391979
664
0.39194
806
0.391901
808
0.391863
904
0.391824
1228
0.391785
1242
0.391746
1305
0.391707
1610
0.391669
2209
0.39163
2333
0.391591
2625
0.391552
2967
0.391513
2978
0.391475
3031
0.391436
2983
0.391397
2978
0.391358
2733
0.39132
2209
0.391281
1922
0.391242
1412
0.391204
1176
0.391165
837
0.391126
521
0.391088
506
0.391049
373
0.39101
401
0.390972
302
0.390933
169
0.390895
154
0.390856
344
0.390817
186
0.390779
212
0.39074
183
0.390702
238
0.390663
126
0.390625
222
0.390586
186
0.390548
161
0.390509
88
0.390471
139
0.390432
252
0.390394
148
0.390355
194
0.390317
82
0.390278
104
0.39024
212
0.390202
0
0.390163
132
0.390125
168
0.390086
206
0.390048
164
0.39001
285
0.389971
126
0.389933
166
0.389895
182
0.389856
206
0.389818
158
0.38978
130
0.389741
156
0.389703
174
0.389665
199
0.389627
227
0.389588
236
0.38955
175
0.389512
114
0.389474
239
0.389435
220
0.389397
158
0.389359
253
0.389321
319
0.389283
23
0.389244
308
0.389206
246
0.389168
295
0.38913
213
0.389092
266
0.389054
end of experiment
